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Control the positioning stage with 1nm resolution!
The 1nm feedback stage can be controlled with a resolution of 1nm. Feedback (full closed-loop) control is performed based on the values from the linear encoder within the stage. Communication control can be achieved via commands, allowing for easy construction of a positioning system.
Streamline inspections and research! Positioning control is possible with 5nm resolution.
It can be used as a 5nm resolution positioning device in combination with a 5nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
Positioning control with 10nm resolution! Improving reproducibility in inspections and research!
It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
Positioning with 100nm resolution! Reproducibility is achieved with position feedback from a linear encoder!
It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Therefore, it is used in precision inspections and research where reproducibility is required. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
Positioning with 50nm resolution! Excellent reproducibility with feedback control, improving inspection efficiency!
It can be used as a positioning device with 50nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, ensuring high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
Positioning with 10nm resolution. Equipped with slowdown function.
It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. The FC-514 is compatible with slow-down sensor signals and ORG sensor signals. The 10nm feedback stage is equipped with a slow-down sensor on the long-scale type stage, enabling high-speed positioning of long strokes with high resolution, which can expand the range of measurement data. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
Positioning with 50nm resolution! Controller for long stages.
It can be used as a positioning device with 50nm resolution when combined with a submicron feedback stage. Feedback (full closed-loop) control is performed based on the position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. The FC-414 supports signal input from slow-down sensors and ORG sensors. This controller is used when employing a long-scale submicron feedback stage. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
Positioning with 100nm resolution! Controller for long stages.
It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, ensuring high resolution and excellent reproducibility. The FC-114 is compatible with signal inputs from slow-down sensors and ORG sensors. This controller is used when employing a long-scale submicron feedback stage. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
